Alignment autocollimator-based microscope adjustment and its quality assessment
نویسندگان
چکیده
We report a custom microscope setup whose mechanical and optical components are adjusted by the means of an alignment autocollimator (AAC). Residual centring angular misalignments towards microscope’s axis below 500 μm 1 mrad, respectively. further perform measurements dot structures with diameters close to diffraction limit (nominal diameter = 200 nm; chrome on glass mask) as suitable measures for evaluation adjustment determine/ visualize aberrations, which affect image formation microscopes.
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ژورنال
عنوان ژورنال: Epj Web of Conferences
سال: 2022
ISSN: ['2101-6275', '2100-014X']
DOI: https://doi.org/10.1051/epjconf/202226610009